Substrate Type
(111) p-Si 5e14, 50keV
Shots: 4a, 4b, 4c, 4d
All 4 shots were okay. All of them 2.5x2.5 mm each.
Sample 4a
6/4/2012 UV-VIS reflection measurement
20120604 UV-VIS reflection Au 4a.Sample.Raw.csv
6/5/2012 UV-VIS transmission measurement
20120605 UV-VIS transmission Au 4a.Sample.Raw.csv
6/11/2012 Laser cut into 7x7 mm sample, solvent clean
Debris due to laser cut observed
On 6/13/2012, found out that this laser cutting procedure raises a normal silicon sample temperature high enough to hard-bake the photoresist, so it could have initiated gold diffusion on 4a.
Sample 4b
6/11/2012 Laser cut into 7x7 mm sample, solvent clean
Debris due to laser cut observed
On 6/13/2012, found out that this laser cutting procedure raises a normal silicon sample temperature high enough to hard-bake the photoresist, so it could have initiated gold diffusion on 4b.