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Sample Fabrication

Substrate

...

n-Si(100) n-Si 5e14, 50keV

Shots: 2a, 2b, 2c, 2d, 2e
All 5 were shot using Harvard YAG, 2.5x2.5 mm each. Spot 2a and 2c look good, but 2b was on a dirty spot with bad TRR. Spot 2d and 2e look good.

...

, ρ = 1-10 Ω-cm

Implantation conditions

Au, 50 keV, 5e14 /cm2 dose

Pulsed laser melting

Spot

Spot size

Laser used

Shooting conditions

Result

A

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

B

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

dirty spot, bad TRR

C

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

D

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

E

2.5x2.5 mm2, masked

Harvard YAG, 355 nm

1 shot @ 0.7 J/cm2

good

Measurements and Processing

Sample 2A
Sample

...

2B
  • 6/13/2012           FIB-cut TEM sample from clean, uniform-looking area. Bottom (relative to shooting maps) 100 um of spot is now gallium-irradiated.