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Sample ID | Substrate | Implantation conditions | Laser spot | Spot size | PLM conditions | Good/Bad | Characterization | Notes | Current location | Owner |
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n-Si(100), ρ = 1-10 Ω-cm | Au, 50 keV, 1e15 /cm2 |
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| A | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| MIT | Jonathan |
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| B | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| MIT | Jonathan |
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| C | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| MIT | Jonathan |
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| D | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
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| E | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
n-Si(100), ρ = 1-10 Ω-cm | Au, 50 keV, 5e15 /cm2 |
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| A | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 | Good |
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| Harvard MIT | Austin Jonathan |
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| B | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 | Bad | SEM, EBSD |
| Harvard MIT | Austin Jonathan |
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| C | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 | Good |
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| Harvard MIT | Austin Jonathan |
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| D | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
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| E | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
p-Si(111), ρ = 1000 Ω-cm | Au, 50 keV, 1e15 /cm2 |
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| A | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 | Bad | SEM, EBSD, TEM | Stacking Faults | MIT | Jonathan |
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| B | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 | Bad |
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| MIT | Jonathan |
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| C | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 | Good |
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| MIT | Jonathan |
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| D | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 | Good |
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| MIT | Jonathan |
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| E | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
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| F | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
p-Si(111), ρ = 1000 Ω-cm | Au, 50 keV, 5e15 /cm2 |
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| A | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| MIT Harvard | Jonathan Austin |
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| B | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| MIT Harvard | Jonathan Austin |
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| C | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
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| D | 2.5 x 2.5 mm2, masked | Harvard YAG355, 1 shot, 0.7 J/cm2 |
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| Benet | Jay |
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